EBL Charge Dissipation Rate–The Overlooked Factor in Lithography Precision

Manufacturers and researchers working with electron beam lithography (EBL) know that achieving crisp, distortion-free patterns is not just a technical goal—it’s a business necessity. Pattern defects, edge roughness, and inconsistent results can mean scrapped wafers, lost time, and missed opportunities. Yet, one of the most overlooked culprits is charge buildup on insulating substrates. As device … Read more